新型扫描电镜分辨率的蒙特卡罗模拟

新型扫描电镜分辨率的蒙特卡罗模拟 Resolution of a New Type of Scanning Electron Microscope, Simulated by Monte Carlo Method 蒋昌忠 JIANG Chang zhong 1 first-author 武汉大学物理科学与技术学院,湖北,武汉,430072 武汉大学物理科学与技术学院,湖北,武汉,430072 School of Physics and Technology, Wuhan University School of Physics and Technology, Wuhan University 用蒙特卡罗方法模拟计算了利用高能同轴背散射电子的扫描电子显微镜的空间分辨率 .点源模型的模拟结果显示小的入射能量、探测能量窗口及探测角值对应较好的分辨率 .对由两种不同元素构成的边界而言 ,模拟结果显示 :好的分辨率对应较小的探测能量窗口和较大的探测角 ,最佳的入射能量是 10keV .在合理优化电镜工作参数的前提下 ,最佳空间分辨率可达束斑大小的量级 . By using the Monte Carlo method, we calculate the spatial resolution of the scanning electron microscope using low loss energy and coaxial backscattered electrons. The simulation results for a pin point electron beam show that a good resolution corresponds to lower values of primary energy, detection energy windows and detection angle. For a chemical step, the simulation results show that a good resolution can be obtained by using a lower value of primary energy and a greater detection angle value; the optical primary energy value is equal to 10 keV. By optimizing the controllable parameters, the best resolution can attain the same order as the beam diameter value. 扫描电子显微镜 同轴背反射电子 蒙特卡罗模拟 分辨率 scanning electron microscope （SEM） coaxial backscattered electron Monte Carlo simulation resolution TN16 国家自然科学基金!（1 0 0 4 50 0 1;1 0 0 0 50 0 5）;教育部骨干教师基金;武汉大学邵逸周研究基金资助项目 2001-01-01 2021-04-01 1