Cu离子注入石英玻璃及退火后的透射率研究

Cu离子注入石英玻璃及退火后的透射率研究 A Transmittivity Study of the Influence of Ion Dose and Annealing Temperature in SiO 2 Glass Implanted with Cu 曹旸 CAO Yang 1 first-author 蒋昌忠 JIANG Chang zhong 1 王取泉 WANG Qu quan 1 范湘军 FAN Xiang jun 1 武汉大学物理科学与技术学院,湖北,武汉,430072 武汉大学物理科学与技术学院,湖北,武汉,430072 School of Physics and Technology, Wuhan University School of Physics and Technology, Wuhan University 将剂量分别为 1× 10 16,3× 10 16,5× 10 16,10× 10 16个 /cm2 的Cu离子注入石英玻璃 ,注入后在可见光区域均可观察到明显的吸收增强效应 ,当注入剂量达到 5× 10 16个 /cm2 及以上时可以观察到位于 5 70nm附近的吸收峰 ,吸收强度随剂量的增加而增加 .将 4个样品经退火处理后 ,吸收普遍增加且吸收峰向长波方向移动 ,注入 3×10 16个 /cm2 的样品也出现了吸收峰 .吸收峰的存在表明注入后有Cu的纳米晶体生成 ,且退火后Cu的纳米晶体成核生长导致共振吸收加强 . Cu ions were implanted into the surface of SiO 2 glass with ion number of 1×10 16,3×10 16, 5×10 16,10×10 16/cm 2 . The implanted samples had obvious increase of optical absorption in the 190 nm to 900 nm wavelength region, an absorption peak near 570 nm could be observed when the ion number was equal or larger than 5×10 16/cm 2 , and the magnitude of the peak increased as increasing of the ion dose. After thermal annealing, the optical absorption of the four samples all increased, and the absorption peak shifted to the longer wavelength, the absorption peak also appeared in the sample implanted with 3×10 16/cm 2 . The existence of absorption peak indicated that there were Cu nanocrystals formed within the sample, and the increase of the plasma resonance was due to the new nuclei’s presence and the growth of the Cu nanocrystals during annealing. 离子注入 玻璃 透射率 ion implantation SiO2 glass transmittivity O436.2 国家自然科学基金!（1 0 0 4 50 0 1;1 0 0 0 50 0 5）;教育部骨干教师基金;武汉大学邵逸周研究基金资助项目 2001-01-01 2021-04-01 1