蒙特卡罗法模拟低失能近轴背散射电子能谱

蒙特卡罗法模拟低失能近轴背散射电子能谱 Energy Distribution of the Low Loss Energy and Coaxial Backscattered Electrons, Simulated by Monte Carlo Method 蒋昌忠 JIANG Chang zhong 1 first-author 武汉大学物理科学与技术学院,湖北,武汉,430072 武汉大学物理科学与技术学院,湖北,武汉,430072 School of Physics and Technology, Wuhan University School of Physics and Technology, Wuhan University 用蒙特卡罗法模拟了探测到的高能同轴背散射电子的能谱 ,分析了入射电子能量、靶原子序数和探测角对归一化能谱的影响 .结果表明 :当入射电子能量增加和靶原子序数减小时 ,弹性散射峰值逐渐降低 ,背散射电子数峰位向低能端移动 ;探测角的改变对能谱形状基本没有影响 .利用较低的入射能量、较大的探测能量窗口和探测角值有利于背散射率的提高 ;大的入射电子能量和小的探测能量窗口对应较大的背散射率的相对变化率 ,探测角值对背散射率的相对变化率基本没有影响 .可以利用大的探测角值提高背散射率以改善信噪比 . By using the Monte Carlo method, we calculate the energy distribution of the low loss energy and coaxial backscattered electrons. We discuss the influence of primary energy, sample atomic number and detection angle upon the energy distribution. The simulation results show that the value of the elastic diffusion peak decreases and the maximum value of backscattered electron number shifts to lower energy as increasing of primary energy and decreasing of sample atomic number. The detection angle has not influence on the energy distribution. The use of lower primary energy, higher energy windows and detection angle can increase the backscattering coefficient. The greater values of primary energy and lower values of energy windows correspond to greater relative variation of backscattering coefficient; the detection angle has no evident effect on the relative variation of backscattering coefficient. It is useful to use greater value of detection angle for increasing the backscattering coefficient and ameliorating the ratio of signal to noise. 扫描电子显微镜 同轴背反射电子 蒙特卡罗模拟 电子能谱 scanning electron microscope coaxial backscattered electrons Monte Carlo simulation energy distribution TN16 国家自然科学基金!（1 0 0 4 50 0 1;1 0 0 0 50 0 5）;教育部骨干教师基金;武汉大学邵逸周研究基金资助项目 2001-01-01 2021-04-01 1