一个改进的气固两用高频离子源

一个改进的气固两用高频离子源 A MODIFIED RADIO—FREQUENCY ION SOURCE FOR BOTH GAS AND SOLID 程世昌 Cheng Shichang Fan Xiangjun Guo Huaixi first-author 范湘军 郭怀喜 本文介绍一种经过改进的气固两用高频离子源。这种离子源改变了旧源的附加磁场,高频耦合感应圈与引出电极之间的安排方向,采用了顶部薄壁的吸极的引出系统以及将管状固体蒸发器插入放电室中,已产生了硼磷等多种离子束,并提高了离子源的性能。 This paper describes a modified radio-frenquency ion source used for both gas and solid. To compare this ion source with those old-fashioned ones, the direction of the high frequency coupling inductor relative to the auxiliary magnetic field and the extracting electrode is changed. In the extracting system, on extracting electrode with thin wall on it’s top is used and a tube solid vapourizer is placed in the discharge chamber. Ion beams of various elements such as boron and phosphorus have been produced with this modified ion source, and the experimental results show that the performance of this source is improved. 1980-04-01 2021-04-01 4