改进型离子源最佳引出条件的研究

改进型离子源最佳引出条件的研究 A STUDY ON THE OPTIMUM EXTRACTING CONDITION OF A MODIFIED ION SOURCE 杨业智 Yang Yezhi Lu Shanshan Cuo Huaixi first-author 陆珊珊 郭怀喜 本文对在气固两用的改进型高频离子源上进行的实验作了叙述。实验得出,引出磷离子流强度是磷加热温度和辅助气体氩气压的函数。测定了磷引出最佳时的工作条件。对实验结果的实际应用作了讨论。 The experiment to study a modified radio-freguency ion source used for both gas and solid is described. It is found that the extracted phosphorus ion beam intensity is a function of the temperature of phosphorus being heated to and the pressure of the auxiliary gas At. The optimum operating conditions for extracting phosphorus ion beam are determined. The possible application of these experimental results is discussed. 1980-04-01 2021-04-01 4