多元素微粒样品电子探针显微定量分析

多元素微粒样品电子探针显微定量分析 QUANTITATIVE ELECTRON-PROBE MICROANALYSIS FOR MULTIELEMENT MICROPARTICLES SPECIMENS 朱绫 Zhu Ling Yang Yezhi Liu Tao 1 first-author 杨业智 1 刘涛 1 武汉大学分析测试中心 武汉大学分析测试中心 Center of Analysis and Measurement, Wuhan University Center of Analysis and Measurement, Wuhan University 本文讨论了多元素微粒样品用x射线波长色散谱仪进行定量分析的方法。将样品中的微粒按其直径与电子作用范围的比值进行分类,各类微粒分别用不同的方法进行校正计算。文中对各校正系数与原子序数和微粒大小之间的变化关系作了讨论。并给出了一个自动分类校正程序,对五元钴基合金等微粒样品进行了测定和校正。文中还讨论了获得微粒样品x射线强度比值的有效方法。 An useful method and correction program for quantitative analysis of elements containing in microparticles by wavelength dispersive spectrometer （WDS） described. The results of the analyzed cobalt alloy containing five elements and the other specimens have been obtained. At different size of particles of specimen, the relations between some important parameters, such as electron backscattering coefficient η, electron backscattering factor R, electron stopping-power factor S and absorption correction factor f（x） and the atomic number Z of element have also been discussed. How to get the correct K value was indicated in this paper. 微粒样品 电子探针显微分析 校正系数 Microparticles specimen Electron-probe microanalysis Correction coefficient 1989-03-01 2021-04-01 3