A Silicon integrated thin film microelectrode based electrochemical sensor devices has been fabricated using silicon micromachining techniques.These unique sensor devices with silicon micromechanical structures offer advantages over a conventional sensor.However

there were some problems to be solved for practical usage

in particular

the stability was affected by electrochemical crosstalk in the devices under long term operating conditions.As example of CO 2 thin film microelectrode devices

some improvements have been investigated in order to reduce and control the electrochemical crosstalk.It is anticipated that we can obtain good long term stability in a coordinative way by improving the devices configuration

developing the stable Ag +/Ag reference electrode instead of Ag/AgCl electrode and using more reasonable micromachining

and that the lifetime is greatly extended

although the electrochemistry in the microsensor devices is surprisingly complicated.