溶胶-凝胶法制备氟化物薄膜光波导

溶胶-凝胶法制备氟化物薄膜光波导 SOL-GEL Synthesis of Fluoride Glass Film 徐跃刚 XU Yue\|gang 1 1 2 first-author 李承芳 LI Cheng\|fang 1 1 2 钟家柽 ZHONG Jia\|cheng 2 1 2 昝菱 ZAN Ling 2 1 2 武汉大学物理学系,武汉,430072 武汉大学物理学系,武汉,430072 Department of Physics, Wuhan University Department of Physics, Wuhan University 武汉大学化学系,武汉,430072 武汉大学化学系,武汉,430072 Department of Chemistry,Wuhan University Department of Chemistry,Wuhan University 以乙酰丙酮盐为原料，用溶胶——凝胶法（Ｓｏｌ－Ｇｅｌ）制备掺铒的锆钡镧铝（ＺＢＬＡ）氟化物薄膜光波导．第一步为制备包含锆钡镧铝及铒的溶胶；第二步为在基底上用旋转镀膜的方法镀膜及氟化．用这种方法得到的薄膜用扫描电镜测量了其组分和表面膜的形态．同时也测得膜的厚度和折射率． Er 3+ \|doped Zr/Ba/La/Al（ZBLA）fluoride glass films have been synthesized by sol\|gel processing using acetylacetone precursor. A first step includes the preparation of a wet gel containing Zr,Ba,La,Al and Er in the respective proportions of the ZBLA glass films.A second step includes the rotate filming and fluorination.Doped Er 3+ ZBLA fluoride glass films are characterized by SEM. The thichness and refractive index are measured at the sametime. 溶胶-凝胶法 乙酰丙酮 氟化物薄膜光波导 sol-gel acetylacetone fluoride film optical waveguide TN304.055 武汉市科技攻关项目 1999-05-01 2021-04-01 5