基于压电双晶片的测量薄膜应变的膨胀仪

基于压电双晶片的测量薄膜应变的膨胀仪 A Bimorph-Based Dilatometer for Strain Measurement in Polymer Film 唐一文 1 first-author 乐望民 1 汪大海 1 国世上 1 赵兴中 1 武汉大学物理学系,武汉,430072 武汉大学物理学系,武汉,430072 Department of Physics, Wuhan University Department of Physics, Wuhan University 研制了一种基于压电双晶片的高灵敏度膨胀仪，它能够在较宽的频率范围内（ｌ～１０ ３ Ｈｚ），可靠、方便地测量自由状态下又薄又软的共聚物薄膜厚度方向的电场致应变．测试结果证明这种新型的膨胀仪在频率为１００Ｈｚ时能探测低至０．１ｎｍ的位移，最后测量了一种共聚物薄膜的电场致应变． We report on a bimorph based dilatometer which is capable of measuring the electric field induced strain response in the out of plane direction of a thin and free standing polymer film samples conveniently over a relatively wide frequency range （1 Hz to 1 kHz）. The test results demonstrate that the dilatometer is capable of detecting displacement down to the 0. 1nm range at 100 Hz. The agreement between the test results and the model analysis indicates that the device can indeed be used reliably for these measurements with high sensitivity. 压电双晶片 共聚物薄膜 电场致应变 膨胀仪 bimorph polymer film strain dilatometer 10.14188/j.1671-8836.2000.01.023 TH823.3 国家自然科学基金!（59973015）;（59943001）;清华大学新型陶瓷与精细工艺国家重点实验室开放基金 2000-01-01 2021-04-01 1