同轴背散射电子相互作用体积的蒙特卡罗模拟

同轴背散射电子相互作用体积的蒙特卡罗模拟 Monte Carlo Simulation of the Interaction Volume of Coaxial Backscattered Electrons in a Solid Target 蒋昌忠 JIANG Chang- zhong 1 first-author 武汉大学物理学系,湖北,武汉,430072 武汉大学物理学系,湖北,武汉,430072 Departm ent of Physics,Wuhan U niversity,Wuhan 0 72 Departm ent of Physics,Wuhan U niversity,Wuhan 0 72 根据利用高能同轴背散射电子的扫描电子显微镜的工作原理 ,用蒙特卡罗方法模拟了电子束在样品中的相互作用范围 ,分析了被探测电子的出射深度分布、计算了逸出面密度分布、平均进入深度和平均逸出距离 ,讨论了上述量与入射电子能量、能量损失窗口、探测角及样品体密度之间的关系 .结果表明 ,入射电子能量、能量损失窗口和样品体密度对相互作用范围影响较大 ,而探测角对相互作用范围基本没有影响 .最后指明了改变分析范围的途径 By using the Monte Carlo method,we simulate the interaction volume of the scanning electron microscope using high energy and coaxial backscattered electrons.We calculate the penetration depth distribution,average penetration depth,superficial density and take- off distance of the coaxial backscattered electrons.We discuss their relationship with the primary energy,energy loss window, detection angle and the sample density.The simulation results show that the primary energy and energy loss window have a greaterinfluence upon the interaction volume,the detection angle has a less influence. The simulation results show how to change the interaction volume by varying the primary energy,energy loss window and detection angle. 扫描电子显微镜 背反射电子 蒙特卡罗模拟 相互作用范围 scanning electron microscope （ SEM） coaxial backscattered electron Monte Carlo simulation interaction volume 10.14188/j.1671-8836.2000.05.018 TN16 国家自然科学基金!（ 10 0 45 0 0 1）;留学回国人员启动基金;武汉大学邵逸周研究基金资助项目 2000-05-01 2021-04-01 5