基于等倾干涉的二维微位移光学传感测距系统

基于等倾干涉的二维微位移光学传感测距系统 A Two-Dimensional Optical Micro-Displacement Sensing and Ranging System Based on New Equal Inclination Interference Structure 周国全 ZHOU Guoquan 1 first-author 张斯磊 ZHANG Silei 1 武汉大学物理科学与技术学院 武汉大学物理科学与技术学院 School of Physics and Technology,Wuhan University School of Physics and Technology,Wuhan University 基于等腰劈等倾干涉原理,利用新型光学装置设计出二维微位移测距系统.运用单片机控制技术对经过CCD（charged coupled device）光电转换后的信号进行采集与存储,再通过VB（visual basic）平台最终在PC终端实现实时监测与显示.该系统针对工件精密加工中的二维位移实施两维度传感与控制,并能对重要建筑物在结构应力作用下的二维微位移实现实时监控和显示其移动速度.系统对两个维度方向的微位移及速度进行分时段交替测量,测量精度能够达到可见光半波长即微米级. Based on a new type of structure for equal inclination interference in an isosceles wedge,with the technologies of photoelectric conversion,the two-dimensional optical micro-displacement sensing and ranging system captures the optical output,It can realize two-dimensional and real-time monitoring and display it on the computer through the VB platform.Such an approach can be used for real-time monitoring of two-dimensional micro displacement of a huge building and the optical precision machining of workpiece.It shows its speed at realtime for it can also realize two-dimensional micro-displacement measurement with high precision up to a half of the wavelength,or the order of micrometer. 等倾干涉 单片机 串行通信 二维微位移 传感器 equal inclination interference single chip microcomputer serial communication two-dimensional micro-displacement sensor 10.14188/j.1671-8836.2010.05.003 O436.1 国家自然科学基金资助项目（10775105） 2010-05-01 2021-04-01 5 56