基于纳米球刻蚀的银纳米颗粒阵列和有序纳米壳层的制备

基于纳米球刻蚀的银纳米颗粒阵列和有序纳米壳层的制备 Ag Nanoparticles Array and Ordered Nanoshells Synthesized by Nanosphere Lithography 刘斌斌 LIU Binbin 1 first-author 肖湘衡 XIAO Xiangheng 1 吴伟 WU Wei 1 任峰 REN Feng 1 蒋昌忠 JIANG Changzhong 1 武汉大学物理科学与技术学院 武汉大学物理科学与技术学院 School of Physics and Technology,Wuhan University School of Physics and Technology,Wuhan University 通过经引流片改进的"漂移法",使单分散聚苯乙烯球胶体颗粒成功自组装形成按六角密排结构的二维胶体晶体.实验结果表明,除存在极少量的线缺陷,可得到大面积（50μm×50μm）的PS球有序排列区域.以上述聚苯乙烯球胶体晶体作为掩膜板,用纳米球刻蚀和电子束蒸镀技术相结合的方法,成功地制备了三角形的银纳米颗粒阵列.以聚苯乙烯球作为"牺牲"纳米球模板,得到了一种简单有效的制备碗状银纳米壳层的方法.这种方法可拓展到其他材料,可通过选择不同粒径的PS球来控制贵金属纳米颗粒的大小和制备不同尺寸的纳米壳层. Through using floating-transferring method modified by introduction of a slide,the monodisperse PS particles can self-assemble to two-dimensional（2D） colloidal crystals with compact hexagonal structure under appropriate conditions.The experimental results indicate that a ordered arrangement region with a large area of 50 μm×50 μm is obtained besides a few of line defects.Based on a combination of nanosphere lithography and e-beam evaporation deposition technique,triangular shaped silver nanoparticles arrays have been fabricated successfully when PS colloidal crystals are served as mask.Simultaneously,PS nanospheres can be regarded as scrificial nanosphere template to guide the formation of bowl-shaped nanoshells,providing a facile method to synthesize such nanostructure.This approach can be expanded to other materials.Additionally,different sizes of the latex spheres can be chosen to produce triangular nanoparticles array and nanoshells with other sizes. 纳米球刻蚀 漂移法 PS球掩膜板 Ag纳米颗粒阵列 碗状纳米壳层 nanosphere lithography float-transferring method PS-nanosphere mask Ag nanoparticles array bowl-shaped nanoshell 10.14188/j.1671-8836.2011.03.003 TB383.1 国家重点基础研究发展计划项目（973）（2009CB939704）;国家自然科学基金资助项目（10905043,11005082） 2011-03-01 2021-04-01 3 57